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1. Kinetic Monte Carlo simulations of nanocrystalline film deposition

Author

Ruan, Shiyun and Schuh, Christopher A.

Subjects
Grain boundaries -- Analysis, Microstructure -- Design and construction, Monte Carlo method -- Usage, Nanotechnology -- Research, Physics
Abstract

A full diffusion kinetic Monte Carlo algorithm is employed to model nanocrystalline film deposition and study the mechanisms of grain nucleation and microstructure formation in the developed films. The study observations showed that as the grain size shrink, they transition from elongated to equiaxed.

Published
2010

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