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2. The finite size effect in a planer inductively coupled plasma

Author

Chin Wook Chung, S.S. Kim, S.H. Seo, H.Y. Chang, and N.S. Yoon

Subjects
Magnetic fields -- Research, Plasma physics -- Research, Physics
Abstract

Plasma parameters from the measured electron energy distribution were obtained by changing the height at low pressure 2mTorr. It was observed that the electron density has a local peak at a certain chamber height while electron temperature decreases monotonously with increasing chamber height.

Published
2000

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