1. Microlenses and microlens arrays formed on a glass plate by use of a CO2 laser
- Author
-
Wakaki, M., Komachi, Y., and Kanai, G.
- Subjects
Lenses -- Research ,Carbon dioxide lasers -- Usage ,X-rays -- Research ,Astronomy ,Physics - Abstract
Microlenses and microlens arrays were formed directly on a surface of a glass plate by use of a C[O.sub.2] laser. When the surface of a glass plate is heated locally to a working point of the glass material by use of a focused C[O.sub.2] laser beam, it tends to become a hyperboloid owing to surface tension, which results in a microlens. A profile of the microlens was measured with an ultrahigh accurate three-dimensional profilometer (Model UA3P, Matsusita Electric Industrial Company Ltd.) that utilizes a specially designed atomic force microscope. An intensity profile and a spot diameter at the focus of the microlens were measured with a microscope and a CCD system utilizing a He-Ne laser as a light source. The focused spot FWHM diameter of 1.35 [[micro]meter] was obtained, and the modulation transfer function was derived from the spot profile. Microlens arrays were also fabricated and characterized. OCIS codes: 040.1240, 140.3470, 350.3950, 080.3650.
- Published
- 1998