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Your search keyword '"Jer-Chyi Wang"' showing total 2 results
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2 results on '"Jer-Chyi Wang"'

1. Carrier transportation mechanism of the TaN/Hf[O.sub.2]/IL/Si structure with silicon surface fluorine implantation

Author

Woei Cherng Wu, Chao-Sung Lai, Tzu-Ming Wang, Jer-Chyi Wang, Chih Wei Hsu, Ming Wen Ma, Wen-Cheng Lo, and Tien Sheng Chao

Subjects
Voltage -- Evaluation, Gate arrays -- Evaluation, Hafnium -- Electric properties, Semiconductors -- Electric properties, Field programmable gate array, Business, Electronics, Electronics and electrical industries
Abstract

The current transportation mechanism of Hf[O.sub.2] gate dielectrics with a TaN metal gate and silicon surface fluorine implantation is examined. Effective trapping levels at 1.25 eV below the HfOF conduction band are observed.

Published
2008

2. Soft breakdown of hafnium oxynitride gate dielectrics

Author

Jer Chyi Wang, De Ching Shie, Tan Fu Lei, and Chung Len Lee

Subjects
Hafnium -- Electric properties, Nitrides -- Electric properties, Oxides -- Electric properties, Gates (Electronics) -- Structure, Physics
Abstract

The soft breakdown modes for hafnium oxynitride (HfON) gate dielectrics under stress are investigated. Large Joule heat damage generated under stress inducing the analog soft breakdown for thick hafnium oxynitride films is used to understand the breakdown of HfON gate dielectrics.

Published
2005

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