1. Enhancing Linearity in Parallel-Plate MEMS Varactors through Repulsive Actuation
- Author
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Roufaida Bensalem, Mohannad Y. Elsayed, Hani H. Tawfik, Frederic Nabki, and Mourad N. El-Gamal
- Subjects
microelectromechanical systems (MEMS) ,varactor ,C–V response ,linearity ,capacitance ,tuning range ,Physics ,QC1-999 ,Microscopy ,QH201-278.5 ,Microbiology ,QR1-502 ,Chemistry ,QD1-999 - Abstract
This paper presents a new MEMS varactor that uses repulsive actuation to achieve an ultra-linear capacitance-to-voltage response. The approach proposed involves actuating the moveable electrode away from the fixed electrode, instead of the conventional closing-the-gap direction. This increasing-gap movement reduces the capacitance as the actuation voltage increases. The MEMS variable capacitor is fabricated using PolyMUMPs technology and exhibits an excellent linearity factor of 99.7% in capacitance-to-voltage response, and a capacitance tuning ratio of 11× was achieved. The proposed strategy will enable the development of high-performance MEMS-based tunable devices for various applications.
- Published
- 2023
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