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Non-equilibrium plasmas have been used as one of the principal technologies for development of microelectronics and they are the basis for the development of new generations of nano-electronics devices required for 65 and 40 nm technologies. Microdischarges recently have become more common in everyday life. Technology of plasma etching has enabled us to develop such discharges and the field of microdischarges has grown into the most interesting field of the physics of collisional non-equilibrium plasmas. Recently, an effort to fabricate microplasma sources that can be integrated with other MEMS devices to form larger Microsystems has been made. Plasma-based microsystems can find application in bio-microelectro- mechanical system (bio-MEMS) sterilization, small-scale materials processing and microchemical analysis systems. However, integrability requires not only a size reduction, but also an understanding of the physics governing the new small-scale discharges. In this paper, we have performed modeling of a breakdown voltage by using Particle-in-Cell/Monte Carlo collision (PIC/MCC) code taking into account the secondary electron emission due to a high field.

We studied statistical behavior of microdischarges of diffuse coplanar surface barrier discharge (DCSBD) operated in nitrogen atmosphere at two input voltage regimes. We measured spectrally unresolved discharge patterns together with discharge electrical parameters using highspeed iCCD camera and digital storage oscilloscope. External synchronization enabled us to measure the discharge pattern during positive and/or negative half-period of input high voltage in the single-shotmode of operation. The comparison of microdischarges behavior during positive, negative and both half periods of input high voltage was performed for two levels of input voltage, i.e. voltage slightly above ignition voltage and high above ignition voltage (“overvoltage”). The number of microchannels crossing discharge gap was counted and compared with number of microdischarge current peaks observed during corresponding half-period of input high voltage. The relations of those incidences was shown and discussed.

Time series of pulsating microdischarges were analysed. The results showed that deterministic chaos is present in these series. The estimated values of the correlation coefficients indicated a strong chaotic discharge behaviour.

The multifractal image analysis of Lichtenberg figures has confirrmed a self- similar arrangement of surface streamers belonging to the special case of electrostatic separation discharges propagating along a surface of polymeric dielectrics.