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Gas chromatography (GC) is an important and widely used technique for separation and analysis in the field of analytical chemistry. Micro gas chromatography has been developed in response to the requirement for on-line analysis and on-site analysis. At the core of micro gas chromatography, microelectromechanical systems (MEMs) have the advantages of small size and low power consumption. This article introduces the stationary phases of micro columns in recent years, including polymer, carbon materials, silica, gold nanoparticles, inorganic adsorbents and ionic liquids. Preparation techniques ranging from classical coating to unusual sputtering of stationary phases are reviewed. The advantages and disadvantages of different preparation methods are analyzed. The paper introduces the separation characteristics and application progress of MEMs columns and discusses possible developments.