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Entering the era of the Internet of Things (IoT) and fifth-generation (5G) mobile networks, the demand for compact, cost-effective, and high-performance sensors and actuators is skyrocketing. Optical technologies as complements to conventional electrical technologies provide a versatile platform to construct sensors and actuators for widespread applications, showing advantages of high data rate, strong multiplexing capability, fast response, low crosstalk, and immunity to electromagnetic interference. In this paper, we provide a comprehensive review of the development progress of optical sensing and actuation technologies. Their applications in optical detectors, optical sensors (further divided into physical and chemical/biological sensors), and optical communication/computing/imaging are presented. For each category of the applications, progress is introduced following the technology evolution trend from optical microelectromechanical systems (MEMS) and nanophotonics to photonic nanosystems. Future development directions of optical sensing/actuation technologies are also proposed.

This study introduces a novel approach for analyzing thin film interference spectra by employing a micro-spectrometer equipped with a spectral chip. Focusing on zinc oxide (ZnO) thin films prepared via the sol–gel method, this research aims to explore the films’ physical properties through spectral analysis. After obtaining the interference spectrum of the ZnO thin films, the peak positions within the spectrum were cataloged. Mathematical simulation was used to adjust the refractive index and thickness of the films to match the simulated interference peak positions with the observed peak positions. The thickness of the prepared ZnO film was estimated to be 4.9 μm and its refractive index at 80 °C was estimated to be 1.96. In addition, the measurement system was used to detect environmental changes, including temperature changes and gas exposure. It was observed that the optical characteristics of ZnO films exhibit marked variations with temperature shifts, enabling the establishment of a temperature calibration curve based on spectral feature displacement. In addition, experiments using a variety of gases showed that NO2 and gaseous isopropanol significantly affect the interference spectrum of ZnO, with the peak of the interference spectrum shifted by 2.3 nm and 5.2 nm, respectively, after injection of the two gases. This indicates that interferometric spectroscopy can serve as an effective tool for ZnO monitoring, capable of selectively detecting specific gases.

Millions of electrostatically actuatable micromirror arrays have been arranged in between windowpanes in inert gas environments, enabling active daylighting in buildings for illumination and climatization. MEMS smart windows can reduce energy consumption significantly. However, to allow personalized light steering for arbitrary user positions with high flexibility, two main limitations must be overcome: first, limited tuning angle spans by MEMS pull-in effects; and second, the lack of a second orthogonal tuning angle, which is highly required. Firstly, design improvements of electrostatically actuatable micromirror arrays are reported by utilizing tailored bottom electrode structures for enlarging the tilt angle (Φ). Considerably larger tuning ranges are presented, significantly improving daylight steering into buildings. Secondly, 2D actuation means free movement of micromirrors via two angles—tilt (Φ) and torsion angle (θ)—while applying two corresponding voltages between the metallic micromirrors and corresponding FTO (fluorine-doped tin oxide) counters bottom electrode pads. In addition, a solution for a notorious problem in MEMS actuation is presented. Micromirror design modifications are necessary to eliminate possible crack formation on metallic structure due to stress concentration during the free movement of 2D actuatable micromirror arrays. The concept, design of micromirror arrays and bottom electrodes, as well as technological fabrication and experimental results are presented and discussed.

Fabry–Perot interferometers (FPIs), comprising foundry-compatible dielectric thin films on sapphire wafer substrates, were investigated for possible use in chemical sensing. Specifically, structures comprising two vertically stacked distributed Bragg reflectors (DBRs), with the lower DBR between a sapphire substrate and a silicon-oxide (SiO2) resonator layer and the other DBR on top of this resonator layer, were investigated for operation in the near-ultraviolet (near-UV) range. The DBRs are composed of a stack of nitride-rich silicon-nitride (SiNx) layers for the higher index and SiO2 layers for the lower index. An exemplary application would be formaldehyde detection at sub-ppm concentrations in air, using UV absorption spectroscopy in the 300–360 nm band, while providing spectral selectivity against the main interfering gases, notably NO2 and O3. Although SiNx thin films are conventionally used only for visible and near-infrared optical wavelengths (above 450 nm) because of high absorbance at lower wavelengths, this work shows that nitride-rich SiNx is suitable for near-UV wavelengths. The interplay between spectral absorbance, transmittance and reflectance in a FPI is presented in a comparative study between one FPI design using stoichiometric material (Si3N4) and two designs based on N-rich compositions, SiN1.39 and SiN1.49. Spectral measurements confirm that if the design accounts for phase penetration depth, sufficient performance can be achieved with the SiN1.49-based FPI design for gas absorption spectroscopy in near-UV, with peak transmission at 330 nm of 64%, a free spectral range (FSR) of 20 nm and a full-width half-magnitude spectral resolution (FWHM) of 2 nm.

Biological component of cells, protein has been effectively studied and investigated using biological sensors. Photonic crystal-based sensor is highly sensitive optical nanostructure it can be manipulated to affect the motion of photon for users' application. In the proposed work microcavity based photonic crystal biosensor has been designed and investigated for its different optical sensing evaluation parameters such as transmission efficiency, sensitivity, Q factor and peak resonant wavelengths. Sensor is designed and analyzed for early detection of colon cancer tissues in blood. Radius of defect micropillar has been increased from 0.16 µm to 0.19 µm. High Quality factor 10232 has been achieved with the micro pillar radius of 0.17 µm and sensitivity 700nm/RIU. Similarly, radius of 0.16 µm, 0.18 µm and 0.19 µm has attained quality factor and sensitivity such as 5324, 7232, 8343 and 111 nm/RIU, 320 nm/RIU and 340 nm/RIU respectively. Compared other work in literature, proposed work has shown better sensing capability. Designed sensor has shown remarkable output and feasibility for future fabrication.

Quantitative in vivo measurement helps physicians determine abnormal tissue size or resection margin accurately. Herein, in vivo 3D imaging of abnormal features during endoscopic operation using a light switching microprojector is reported. The microprojector features rotational offset microlens arrays and a customized illumination fiber bundle fully integrated through a single illumination channel of a clinical endoscope. The illumination channel switches white light into structured laser patterns on demand. The 3D profiles are precisely extracted by calculating the distortion of uniform structured patterns on a target surface. The 3D endoscope allows the precise measurement of the size and volume of polyp phantoms within 7.70% and 13.33% errors, respectively. The experimental results show the accurate measurements of abnormal ex vivo human abnormal tissue and in vivo volume changes in the inflated stomach wall of an anesthetized pig. The microprojector can provide a new opportunity for in vivo 3D endoscopic imaging and biometric applications.

Abstract Conventional pain assessment methods such as patients’ self-reporting restrict the possibility of easy pain monitoring while pain serves as an important role in clinical practice. Here we report a pain assessment method via 3D face reading camera assisted by dot pattern illumination. The face reading camera module (FRCM) consists of a stereo camera and a dot projector, which allow the quantitative measurement of facial expression changes without human subjective judgement. The rotational offset microlens arrays (roMLAs) in the dot projector form a uniform dense dot pattern on a human face. The dot projection facilitates evaluating three-dimensional change of facial expression by improving 3D reconstruction results of non-textured facial surfaces. In addition, the FRCM provides consistent pain rating from 3D data, regardless of head movement. This pain assessment method can provide a new guideline for precise, real-time, and continuous pain monitoring.

Abstract Implementing 3D surface imaging camera systems into miniaturized devices for a variety of 3D applications such as movement recognition, object sensing, and 3D endoscopy has received great attention over the past decade. Recently, various MEMS techniques enabled the fabrication of key optical elements for 3D surface imaging with compact size, reasonable cost, and high yield. This article will overview the principles of major categories of 3D surface imaging techniques and their applications using optical MEMS devices for compact 3D surface imaging camera.

Today flexibility means to produce reasonably priced customized products of high quality that can be quickly delivered to customers. The article analyses issues related to physic, able to generating defects, affecting the reliability limits for MEMS (Micro-Electro-Mechanical Systems). The MEMS industry is currently at a much more vulnerable position than it appears, regardless of how wonderful its future may look like. A full understanding of the physics and statistics of the defect generation is required to investigate the ultimate reliability limitations for nanodevices. Biggest challenge: cost effective, high volume production.

Mid-infrared (MIR) photonics are generating considerable interest because of the potential applications in spectroscopic sensing, thermal imaging, and remote sensing. Silicon photonics is believed to be a promising solution to realize MIR photonic integrated circuits (PICs). The past decade has seen a huge growth in MIR PIC building blocks. However, there is still a need for the development of MIR reconfigurable photonics to enable powerful on-chip optical systems and new functionalities. In this paper, we present an MIR (3.7~4.1 μm wavelength range) MEMS reconfiguration approach using the suspended silicon waveguide platform on the silicon-on-insulator. With the sub-wavelength grating claddings, the photonic waveguide can be well integrated with the MEMS actuator, thus offering low-loss, energy-efficient, and effective reconfiguration. We present a simulation study on the waveguide design and depict the MEMS-integration approach. Moreover, we experimentally report the suspended waveguide with propagation loss (−2.9 dB/cm) and bending loss (−0.076 dB each). The suspended waveguide coupler is experimentally investigated. In addition, we validate the proposed optical MEMS approach using a reconfigurable ring resonator design. In conclusion, we experimentally demonstrate the proposed waveguide platform’s capability for MIR MEMS-reconfigurable photonics, which empowers the MIR on-chip optical systems for various applications.

Imaging applications based on microlens arrays (MLAs) have a great potential for the depth sensor, wide field-of-view camera and the reconstructed hologram. However, the narrow depth-of-field remains the challenge for accurate, reliable depth estimation. Multifocal microlens array (Mf-MLAs) is perceived as a major breakthrough, but existing fabrication methods are still hindered by the expensive, low-throughput, and dissimilar numerical aperture (NA) of individual lenses due to the multiple steps in the photolithography process. This paper reports the fabrication method of high NA, Mf-MLAs for the extended depth-of-field using single-step photolithography assisted by chemical wet etching. The various lens parameters of Mf-MLAs are manipulated by the multi-sized hole photomask and the wet etch time. Theoretical and experimental results show that the Mf-MLAs have three types of lens with different focal lengths, while maintaining the uniform and high NA irrespective of the lens type. Additionally, we demonstrate the multi-focal plane image acquisition via Mf-MLAs integrated into a microscope.

3D imaging of a biological sample provides information about cellular and subcellular structures that are important in cell biology and related diseases. However, most 3D imaging systems, such as confocal and tomographic microscopy systems, are complex and expensive. Here, we developed a quasi-3D imaging tool that is compatible with most conventional microscopes by integrating micromirrors and microchannel structures on coverslips to provide bidirectional imaging. Microfabricated micromirrors had a precisely 45° reflection angle and optically clean reflective surfaces with high reflectance over 95%. The micromirrors were embedded on coverslips that could be assembled as a microchannel structure. We demonstrated that this simple disposable device allows a conventional microscope to perform bidirectional imaging with simple control of a focal plane. Images of microbeads and cells under bright-field and fluorescent microscopy show that the device can provide a quick analysis of 3D information, such as 3D positions and subcellular structures.

The miniaturization of 3D depth camera systems to reduce cost and power consumption is essential for their application in electrical devices that are trending toward smaller sizes (such as smartphones and unmanned aerial systems) and in other applications that cannot be realized via conventional approaches. Currently, equipment exists for a wide range of depth-sensing devices, including stereo vision, structured light, and time-of-flight. This paper reports on a miniaturized 3D depth camera based on a light field camera (LFC) configured with a single aperture and a micro-lens array (MLA). The single aperture and each micro-lens of the MLA serve as multi-camera systems for 3D surface imaging. To overcome the optical alignment challenge in the miniaturized LFC system, the MLA was designed to focus by attaching it to an image sensor. Theoretical analysis of the optical parameters was performed using optical simulation based on Monte Carlo ray tracing to find the valid optical parameters for miniaturized 3D camera systems. Moreover, we demonstrated multi-viewpoint image acquisition via a miniaturized 3D camera module integrated into a smartphone.

The purpose of this paper is to show the feasibility of grasping force control by feeding back signals of the developed micro-laser Doppler velocimeter (μ-LDV) and by discriminating whether a grasped object is slipping or not. LDV is well known as a high response surface velocity sensor which can measure various surfaces—such as metal, paper, film, and so on—thus suggesting the potential application of LDV as a slip sensor for grasping various objects. However, the use of LDV as a slip sensor has not yet been reported because the size of LDVs is too large to be installed on a robotic fingertip. We have solved the size problem and enabled the performance of a feasibility test with a few-millimeter-scale LDV referred to as micro-LDV (μ-LDV) by modifying the design which was adopted from MEMS (microelectromechanical systems) fabrication process. In this paper, by applying our developed μ-LDV as a slip sensor, we have successfully demonstrated grasping force control with three target objects—aluminum block, wood block, and white acrylic block—considering that various objects made of these materials can be found in homes and factories, without grasping force feedback. We provide proofs that LDV is a new promising candidate slip sensor for grasping force control to execute target grasping.

This work reports the design and opto-mechanical characterization of high velocity comb-drive actuators producing in-plane motion and fabricated using the technology of deep reactive ion etching (DRIE) of silicon-on-insulator (SOI) substrate. The actuators drive vertical mirrors acting on optical beams propagating in-plane with respect to the substrate. The actuator-mirror device is a fabrication on an SOI wafer with 80 μm etching depth, surface roughness of about 15 nm peak to valley and etching verticality that is better than 0.1 degree. The travel range of the actuators is extracted using an optical method based on optical cavity response and accounting for the diffraction effect. One design achieves a travel range of approximately 9.1 µm at a resonance frequency of approximately 26.1 kHz, while the second design achieves about 2 µm at 93.5 kHz. The two specific designs reported achieve peak velocities of about 1.48 and 1.18 m/s, respectively, which is the highest product of the travel range and frequency for an in-plane microelectromechanical system (MEMS) motion under atmospheric pressure, to the best of the authors’ knowledge. The first design possesses high spring linearity over its travel range with about 350 ppm change in the resonance frequency, while the second design achieves higher resonance frequency on the expense of linearity. The theoretical predications and the experimental results show good agreement.

Optofluidics is a rapidly growing versatile branch of adaptive optics including a wide variety of applications such as tunable beam shaping tools, mirrors, apertures, and lenses. In this review, we focus on recent developments in optofluidic lenses, which arguably forms the most important part of optofluidics devices. We report first on a number of general characteristics and characterization methods for optofluidics lenses and their optical performance, including aberrations and their description in terms of Zernike polynomials. Subsequently, we discuss examples of actuation methods separately for spherical optofluidic lenses and for more recent tunable aspherical lenses. Advantages and disadvantages of various actuation schemes are presented, focusing in particular on electrowetting-driven lenses and pressure-driven liquid lenses that are covered by elastomeric sheets. We discuss in particular the opportunities for detailed aberration control by using either finely controlled electric fields or specifically designed elastomeric lenses.

This topical review discusses recent development and trends on scanning micromirrors for biomedical applications. This also includes a biomedical micro robot for precise manipulations in a limited volume. The characteristics of medical scanning micromirror are explained in general with the fundamental of microelectromechanical systems (MEMS) for fabrication processes. Along with the explanations of mechanism and design, the principle of actuation are provided for general readers. In this review, several testing methodology and examples are described based on many types of actuators, such as, electrothermal actuators, electrostatic actuators, electromagnetic actuators, pneumatic actuators, and shape memory alloy. Moreover, this review provides description of the key fabrication processes and common materials in order to be a basic guideline for selecting micro-actuators. With recent developments on scanning micromirrors, performances of biomedical application are enhanced for higher resolution, high accuracy, and high dexterity. With further developments on integrations and control schemes, MEMS-based scanning micromirrors would be able to achieve a better performance for medical applications due to small size, ease in microfabrication, mass production, high scanning speed, low power consumption, mechanical stable, and integration compatibility.