1. Design and Growth of P-Type AlGaN Graded Composition Superlattice
- Author
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Yang Liu, Xue Yang, Xiaowei Zhou, Peixian Li, Bo Yang, Zhuang Zhao, Yingru Xiang, and Junchun Bai
- Subjects
superlattice ,MOCVD ,periodic thickness ,hole concentration ,Mechanical engineering and machinery ,TJ1-1570 - Abstract
A graded composition superlattice structure is proposed by combining simulation with experimentation. The structural factors affecting graded symmetric superlattices and graded asymmetric superlattices and their action modes are simulated and analyzed. A Mg-doped graded symmetric superlattice structure with high Al content, excellent structural quality, good surface morphology and excellent electrical properties was grown by MOCVD equipment. The AlxGa1−xN superlattice with Al composition of 0.7 in the barrier exhibits a hole concentration of approximately 5 × 1015 cm−3 and a resistivity of 66 Ω·cm.
- Published
- 2024
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