8 results on '"Schlax, Michael P."'
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2. Experimental model verification of the thermal response of optical reticles.
3. Film stress changes during anodic bonding of NGL masks.
4. Comparison of substrate curvature and resonant frequency thin film stress mapping techniques.
5. Finite element modeling of SCALPEL masks.
6. Stress mapping techniques for the SCALPEL mask membrane system.
7. Modal analysis of the SCALPEL mask using experimental and numerical methods.
8. Dynamic characterization of step-induced vibrations of x-ray mask membranes.
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