66 results on '"Saile, Volker"'
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2. Photoemission from doped solid rare gases.
3. BackMatter.
4. Device Fabrication–An Example.
5. Enabling Technologies II–Contamination Control.
6. Enabling Technologies I–Wafer Planarization and Bonding.
7. Nanofabrication by Self-Assembly.
8. LIGA.
9. Lithography.
10. Doping and Surface Modification.
11. Etching Technologies.
12. Deposition Technologies.
13. Vacuum Technology.
14. Introduction–MEMS, a Historical Perspective.
15. FrontMatter.
16. Numerical simulations of achromatic x-ray lenses.
17. Achromatic x-ray focusing using diffractive and refractive elements.
18. Introduction: LIGA and Its Applications.
19. Polymer Optics and Optical MEMS.
20. Microinjection Molding Machines.
21. Exposure and Development Simulation for Deep X-Ray LIGA.
22. Refractive X-Ray Lenses Produced by X-Ray Lithography.
23. PTFE Photo-Fabrication by Synchrotron Radiation.
24. Front Matter.
25. Evolution of the Microspectrometer.
26. Hot Embossing of LIGA Microstructures.
27. Application of Inspection Devices.
28. Index.
29. The Micro Harmonic Drive Gear.
30. Dramatic Downsizing of Soft X-Ray Synchrotron Light Source from Compact to Tabletop.
31. Innovative Exposure Techniques for 3D Microfabrication.
32. Commercialization of LIGA.
33. Filled Resist Systems.
34. X-Ray Masks for LIGA Microfabrication.
35. Design for LIGA and Safe Manufacturing.
36. Actuator Manufacture with LIGA Processes.
37. RF Applications.
38. Development of Microfluidic Devices Created via the LIGA Process.
39. X-ray Lenses Fabricated by LIGA Technology.
40. Near-diffraction limited coherent x-ray focusing using planar refractive lenses made of epoxy SU-8 resist.
41. Submicron focusing of high-energy x-rays with Ni refractive lenses.
42. Planar sets of cross x-ray refractive lenses from SU-8 polymer.
43. Focusing properties of x-ray polymer refractive lenses from SU-8 resist layer.
44. X-ray lens with kinoform refractive profile created by x-ray lithography.
45. Manufacturing of microcomponents in a research institute under DIN EN ISO 9001.
46. Microspectrometer system for the near-infrared wavelength range based on LIGA technology.
47. Commissioning and initial results of a x-ray microprobe operating in the energy region of 2000 eV to 12000 eV at CAMD.
48. Mass separation using thin PTFE membranes.
49. Electromechanically driven microchopper for integration in microspectrometers based on LIGA technology.
50. Application domains for synchrotron radiation sources of various energies.
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