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1. Surface topography of planar PMMA grating structures produced by the UV-laser based phase mask method.

Author

C. Wochnowski, S. Metev, and F. Vollertsen

Abstract

Surface relief gratings are written into the surface of a planar PMMA substrate by the UV-excimer laser based phase mask method. The surface relief grating topography (grating amplitude and grating constant) is investigated in dependence on the laser irradiation parameters (fluence and irradiation dose) yielding some information relevant for the ablation and grating formation mechanism. [ABSTRACT FROM AUTHOR]

Published
2006

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