1. High field dielectric response in κ-Ga2O3 films.
- Author
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He, Fan, Jiang, Kunyao, Choi, Yeseul, Aronson, Benjamin L., Shetty, Smitha, Tang, Jingyu, Liu, Bangzhi, Liu, Yongtao, Kelley, Kyle P., Rayner Jr., Gilbert B., Davis, Robert F., Porter, Lisa M., and Trolier-McKinstry, Susan
- Subjects
METAL organic chemical vapor deposition ,ATOMIC layer deposition ,PIEZORESPONSE force microscopy ,PERMITTIVITY ,ELECTRICAL resistivity ,FERROELECTRICITY - Abstract
κ-Ga
2 O3 has been predicted to be a potential ferroelectric material. In this work, undoped Ga2 O3 films were grown by either plasma-enhanced atomic layer deposition (PEALD) or metal organic chemical vapor deposition (MOCVD) on platinized sapphire substrates. 50 nm thick PEALD films with a mixture of κ-Ga2 O3 and β-Ga2 O3 had a relative permittivity of ∼27, a loss tangent below 2%, and high electrical resistivity up to ∼1.5 MV/cm. 700 nm thick MOCVD films with predominantly the κ-Ga2 O3 phase had relative permittivities of ∼18 and a loss tangent of 1% at 10 kHz. Neither film showed compelling evidence for ferroelectricity measured at fields up to 1.5 MV/cm, even after hundreds of cycles. Piezoresponse force microscopy measurements on bare κ-Ga2 O3 showed a finite piezoelectric response that could not be reoriented for electric fields up to 1.33 MV/cm. [ABSTRACT FROM AUTHOR]- Published
- 2023
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