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Oxygen release and out-diffusion in zinc oxide crystals during heavy ions bombardment has been suggested by many experimental techniques. In this work we have employed secondary ion mass spectrometry to study ZnO implanted with ytterbium ions. Our measurements confirm formation of an oxygen-depleted layer and oxygen out-diffusion and agglomeration at the surface. Moreover, an average compositional change in a heavily damaged near-surface region can also be monitored. This reproducible measurement procedure with subnanometer depth resolution allows to localize precisely these altered layers at the depth of 14–28 nm (oxygen-depleted layer) and 9 nm (maximum of the amorphized region). Such precise measurements may prove to be valuable for further characterization of ion beam induced defects in wide bandgap compound semiconductors and optimization of optoelectronic devices based on these materials. [ABSTRACT FROM AUTHOR]