Search

Thermal transpiration pumping in multistage assemblies is computationally investigated. Each stage is formed by combining in series-long microchannels with (a) uniform–uniform ("uni–uni"), (b) converging–uniform ("con–uni"), (c) diverging–uniform ("div–uni") and (d) converging–diverging ("con–div") rectangular cross sections. In all four investigated assemblies the generated pressure difference with the associated mass flow rate is fully assessed, in terms of inlet pressure, inclination parameter and number of stages. The analysis is based on linear kinetic modeling and is valid in the whole range of gas rarefaction. It is concluded that the "con–uni" and "div–uni" assemblies provide higher pressure differences and lower mass flow rates than the "uni–uni" assembly and they may be more suitable for specific pumping applications. The characteristics of the "con–uni" and "div–uni" assemblies are very close to each other. The multistage "uni–uni", "con–uni" and "div–uni" assemblies are more stable when operating at small inlet pressures, where the pressure difference remains almost constant in wide ranges of mass flow rate. It is advisable to add as many stages as possible to increase, depending on the application, either the pressure difference or mass flow rate or both. Furthermore, the "con–div" assembly provides smaller pressure differences and mass flow rates than the other three, but it is suitable for diode applications. It is characterized by the so-called blocking inlet pressure, where the deduced pressure difference in the converging and diverging channels is the same. A detailed parametrization of the blocking inlet pressure in terms of inclination ratio, mean height, temperature difference and gas species, has been performed. It is concluded that multistage "con–div" assemblies may be ideally applied as thermally driven microfluidic diodes to control or block the flow, as well as to separate the species in multicomponent gas mixtures. [ABSTRACT FROM AUTHOR]

The manufacturing process and architecture of three Knudsen type micropumps are discussed and the associated flow performance characteristics are investigated. The proposed fabrication process, based on the deposition of successive dry film photoresist layers with low thermal conductivity, is easy to implement, adaptive to specific applications, cost-effective, and significantly improves thermal management. Three target application designs, requiring high mass flow rates (pump A), high pressure differences (pump B), and relatively high mass flow rates and pressure differences (pump C), are proposed. Computations are performed based on kinetic modeling via the infinite capillary theory, taking into account all foreseen manufacturing and operation constraints. The performance characteristics of the three pump designs in terms of geometry (number of parallel microchannels per stage and number of stages) and inlet pressure are obtained. It is found that pumps A and B operate more efficiently at pressures higher than 5 kPa and lower than 20 kPa, respectively, while the optimum operation range of pump C is at inlet pressures between 1 kPa and 20 kPa. In all cases, it is advisable to have the maximum number of stages as well as of parallel microchannels per stage that can be technologically realized. [ABSTRACT FROM AUTHOR]