1. Optical Properties of Ferroelectric Films HfxZryO2 and La:HfxZryO2 according to Ellipsometry Data.
- Author
-
Kruchinin, V. N., Spesivtsev, E. V., Rykhlitsky, C. V., Gritsenko, V. A., Mehmood, F., Mikolajick, T., and Schroeder, U.
- Subjects
OPTICAL properties ,RANDOM access memory ,ELLIPSOMETRY ,FLASH memory ,OXIDE coating - Abstract
Recently ferroelectric properties have been found in hafnia-based nanosized films. Such films are of the utmost interest for development of a universal memory, which combines the advantages of random access memory and flash memory. The paper studies optical properties of hafnia-zirconium oxide films H-f
x Zry O2 and lanthanum-alloyed hafnia-zirconium oxide films La:Hfx Zry O2 . Fluctuations of thickness in Hfx Zry O2 do not exceed 3.5%, fluctuations of thickness in La:Hfx Zry O2 films—3.2%. Optical properties are analyzed based on effective-medium theory. According to effective-medium theory data, Hfx Zry O2 films contain 46% HfO2 , 54% ZrO2 , La:Hfx Zry O2 films contain 47.5% HfO2 , 52.4% ZrO2 , 2.5% La2 O3 . [ABSTRACT FROM AUTHOR]- Published
- 2023
- Full Text
- View/download PDF