1. Structural and electrical properties of ZnO films on freestanding thick diamond films.
- Author
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Jian Sun, YiZhen Bai, JingChang Sun, GuoTong Du, and Xin Jiang
- Subjects
ZINC oxide thin films ,DIAMONDS ,CHEMICAL vapor deposition ,X-ray diffraction ,ELECTRON probe microanalysis - Abstract
In this paper, ZnO films are deposited on freestanding thick diamond films (FTDF) by plasma-assisted metal organic chemical vapour deposition (MOCVD). Diethyl zinc (DEZn), 0
2 and N2 0 are applied as precursors and different substrate temperatures are used to achieve high quality ZnO films. The influence of substrate temperature on the properties of ZnO films is systematically investigated by X-ray diffraction (XRD), Hall measurements and electron probe microanalysis (EPMA). Experimental results demonstrate that ZnO films deposited at 600°C and 73 Pa display a fine electrical quality and ZnIO atomic ratio plays an important role in the electrical property of ZnO films. [ABSTRACT FROM AUTHOR]- Published
- 2008
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