1. Effects of Negative-Bias-Temperature-Instability on Low-Frequency Noise in SiGe p MOSFETs.
- Author
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Duan, Guo Xing, Hachtel, Jordan A., Zhang, En Xia, Zhang, Cher Xuan, Fleetwood, Daniel M., Schrimpf, Ronald D., Reed, Robert A., Mitard, Jerome, Linten, Dimitri, Witters, Liesbeth, Collaert, Nadine, Mocuta, Anda, Thean, Aaron Voon-Yew, Chisholm, Matthew F., and Pantelides, Sokrates T.
- Abstract
We have measured the low-frequency 1/ f noise of Si0.55Ge0.45 p MOSFETs with a Si capping layer and SiO2/HfO2/TiN gate stack as a function of frequency, gate voltage, and temperature (100–440 K). The magnitude of the excess drain voltage noise power spectral density ( \textitS {vd} ) is unaffected by negative-bias-temperature stress (NBTS) for temperatures below ~250 K, but increases significantly at higher temperatures. The noise is described well by the Dutta-Horn model before and after NBTS. The noise at higher measuring temperatures is attributed primarily to oxygen-vacancy and hydrogen-related defects in the SiO2 and HfO2 layers. At lower measuring temperatures, the noise also appears to be affected strongly by hydrogen-dopant interactions in the SiGe layer of the device. [ABSTRACT FROM PUBLISHER]
- Published
- 2016
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