1. Pulsed laser deposited Nb doped TiO2 as a transparent conducting oxide
- Author
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Dabney, Matthew S., van Hest, Maikel F.A.M., Teplin, Charles W., Arenkiel, S. Phil, Perkins, John D., and Ginley, David S.
- Subjects
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THIN films , *PULSED laser deposition , *SURFACES (Technology) , *SOLID state electronics - Abstract
Abstract: Nb doped TiO2 (Nb:TiO2) is a promising indium-free transparent conducting oxide. We have examined the growth of Nb:TiO2 thin films by pulsed laser deposition (PLD) on SrTiO3, LaAlO3, and fused silica. For <004> oriented anatase Nb:TiO2 films grown on SrTiO3 by PLD at 550 °C, the conductivity can be as high as 2500 S/cm. A nearly thickness independent conductivity for Nb:TiO2 demonstrates that the conductivity is a bulk property and not a substrate interface effect. In addition, Nb:TiO2 films deposited at room temperature were annealed at temperatures up to 750 °C in either vacuum or 1.3×10−3 Pa O2. For these films, conductivities as high as 3300 S/cm on SrTiO3 and 85 S/cm on LaAlO3 substrates were obtained for the highest temperature vacuum anneals, albeit with some loss in transparency. [Copyright &y& Elsevier]
- Published
- 2008
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