1. Structure and mechanical properties investigation of MoSe2-Ag composite films fabricated by magnetron co-sputtering.
- Author
-
Zhan, Wenyi, Zou, Jianpeng, Tang, Lei, Wei, Hongming, and Li, Feiyang
- Subjects
- *
NANOMECHANICS , *MAGNETRONS , *X-ray photoelectron spectroscopy , *TRANSMISSION electron microscopy , *SCANNING electron microscopy , *X-ray spectroscopy - Abstract
MoSe 2 -Ag composite films are fabricated by the magnetron co-sputtering method in this study. The effects of Ag concentration on the composition, microstructure and mechanical properties of the films are analyzed by X-ray diffraction, scanning electron microscopy, energy-dispersive X-ray spectroscopy, X-ray photoelectron spectroscopy, high-resolution transmission electron microscopy and nanoindentation measurements. The results show that the incorporation of Ag during co-sputtering can inhibit the growth of the columnar crystal in the MoSe 2 films. With increasing Ag content, the microstructure of the MoSe 2 -Ag composite films undergoes a structural transformation from a columnar structure to a compact and featureless structure and then to a granular structure. It is confirmed that in the MoSe 2 -30.3 at% Ag composite film, the amorphous Ag phase is diffusely distributed in the MoSe 2 matrix and the addition of Ag does not change the initial chemical state of MoSe 2. The measured hardness of the MoSe 2 -Ag composite films decreases with increasing Ag content. In contrast, the modulus of the films increases with increasing Ag content. A suitable Ag incorporation of 30.3 at% results in relatively comprehensive mechanical properties with a hardness and modulus of 2.2 ± 0.1 and 48.4 ± 2.6 GPa, respectively. • The MoSe 2 -Ag composite films were prepared through magnetron co-sputtering. • The influence of Ag addition on the microstructure transformation is investigated. • The addition of Ag induced a decrease in film hardness but improved its modulus. • MoSe 2 -30.3 at% Ag film shows a compact structure and comprehensive mechanical properties. [ABSTRACT FROM AUTHOR]
- Published
- 2023
- Full Text
- View/download PDF