1. Crystallization of Si Templates of Controlled Shape, Size, and Orientation: Toward Micro- and Nanosubstrates.
- Author
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Yann Cohin, Frank Glas, Cattoni, Andrea, Bouchoule, Sophie, Mauguin, Olivia, Largeau, Ludovic, Patriarche, Gilles, Sønderga°rd, Elin, and Jean-Christophe Harmand
- Subjects
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CRYSTALLIZATION , *SILICON analysis , *CHEMICAL templates , *NANOSTRUCTURED materials , *SUBSTRATES (Materials science) , *ALUMINUM analysis - Abstract
Fiber-textured polycrystalline silicon thin films have demonstrated their interest as seed layers for the epitaxial growth of high-quality materials on substrates such as glass or plastics. In the present work, we report a comprehensive study of the aluminum-induced crystallization (AIC) of isolated Si domains. Our study not only demonstrates the fabrication by AIC of shape- and size-controlled Si monocrystals at the nanoscale but also allows for the prediction of minimal annealing conditions for complete crystallization of such structures. These ultrathin [111]-oriented monocrystals are promising candidates as selected-area epitaxy substrates with both an easy control on the morphology of these structures and a low-temperature fabrication process. [ABSTRACT FROM AUTHOR]
- Published
- 2015
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