1. Growth and fabrication of sputtered TiO2 based ultraviolet detectors.
- Author
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Huang, Huolin, Xie, Yannan, Zhang, Zifeng, Zhang, Feng, Xu, Qiang, and Wu, Zhengyun
- Subjects
- *
TITANIUM dioxide films , *CRYSTAL growth , *SPUTTERING (Physics) , *METAL-semiconductor-metal structures , *METAL fabrication , *DARK currents (Electric) - Abstract
Highlights: [•] Metal-semiconductor-metal (MSM) structure detectors with diverse finger spacings were fabricated on the sputtered TiO2 films. [•] High quality TiO2 films and good Au/TiO2 Schottky contacts were achieved. [•] The detectors exhibit lower dark current and higher UV-to-visible rejection ratio. [•] The mechanism of diverse finger spacing on the device performances is analyzed. [•] The detectors are promising in commercial production due to low cost and ease of fabrication process. [ABSTRACT FROM AUTHOR]
- Published
- 2014
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