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X-ray nanotomography is a powerful tool for the characterization of nanoscale materials and structures, but it is difficult to implement due to the competing requirements of X-ray flux and spot size. Due to this constraint, state-of-the-art nanotomography is predominantly performed at large synchrotron facilities. We present a laboratory-scale nanotomography instrument that achieves nanoscale spatial resolution while addressing the limitations of conventional tomography tools. The instrument combines the electron beam of a scanning electron microscope (SEM) with the precise, broadband X-ray detection of a superconducting transition-edge sensor (TES) microcalorimeter. The electron beam generates a highly focused X-ray spot on a metal target held micrometers away from the sample of interest, while the TES spectrometer isolates target photons with a high signal-to-noise ratio. This combination of a focused X-ray spot, energy-resolved X-ray detection, and unique system geometry enables nanoscale, element-specific X-ray imaging in a compact footprint. The proof of concept for this approach to X-ray nanotomography is demonstrated by imaging 160 nm features in three dimensions in six layers of a Cu-SiO2 integrated circuit, and a path toward finer resolution and enhanced imaging capabilities is discussed. [ABSTRACT FROM AUTHOR]

Feature sizes in integrated circuits have decreased substantially over time, and it has become increasingly difficult to three-dimensionally image these complex circuits after fabrication. This can be important for process development, defect analysis, and detection of unexpected structures in externally sourced chips, among other applications. Here, we report on a non-destructive, tabletop approach that addresses this imaging problem through x-ray tomography, which we uniquely realize with an instrument that combines a scanning electron microscope (SEM) with a transition-edge sensor (TES) x-ray spectrometer. Our approach uses the highly focused SEM electron beam to generate a small x-ray generation region in a carefully designed target layer that is placed over the sample being tested. With the high collection efficiency and resolving power of a TES spectrometer, we can isolate x-rays generated in the target from background and trace their paths through regions of interest in the sample layers, providing information about the various materials along the x-ray paths through their attenuation functions. We have recently demonstrated our approach using a 240 Mo/Cu bilayer TES prototype instrument on a simplified test sample containing features with sizes of ~ 1 μm. Currently, we are designing and building a 3000 Mo/Au bilayer TES spectrometer upgrade, which is expected to improve the imaging speed by factor of up to 60 through a combination of increased detector number and detector speed. [ABSTRACT FROM AUTHOR]

The article focuses on the application of superconducting x-ray detectors in tomographic analysis of microelectronics. It discusses the challenges in analyzing the internal structure and composition of integrated circuits (ICs); the use of superconducting transition-edge sensors (TES) to enhance the efficiency and accuracy of x-ray imaging; enabling non-destructive tomography of ICs; and also explores future directions.

For X-ray imaging spectroscopy, high spatial resolution over a large field of view is often as important as high energy resolution, but current X-ray detectors do not provide both in the same device. Thermal Kinetic Inductance Detectors (TKIDs) are being developed as they offer a feasible way to combine the energy resolution of transition edge sensors with pixel counts approaching CCDs and thus promise significant improvements for many X-ray spectroscopy applications. TKIDs are a variation of Microwave Kinetic Inductance Detectors (MKIDs) and share their multiplexibility: working MKID arrays with 2024 pixels have recently been demonstrated and much bigger arrays are under development. In this work, we present a TKID prototype, which is able to achieve an energy resolution of 75 eV at 5.9 keV, even though its general design still has to be optimized. We further describe TKID fabrication, characterization, multiplexing, and working principle and demonstrate the necessity of a data fitting algorithm in order to extract photon energies. With further design optimizations, we expect to be able to improve our TKID energy resolution to less than 10 eV at 5.9 keV. [ABSTRACT FROM AUTHOR]

Charge density waves (CDWs) have been observed in nearly all families of copper-oxide superconductors. But the behavior of these phases across different families has been perplexing. In La-based cuprates, the CDW wavevector is an increasing function of doping, exhibiting the so-called Yamada behavior, while in Y- and Bi-based materials the behavior is the opposite. Here, we report a combined resonant soft X-ray scattering (RSXS) and neutron scattering study of charge and spin density waves in isotopically enriched La1.8-x Eu0.2SrxCuO4 over a range of doping 0.07 = x = 0.20. We find that the CDW amplitude is temperature independent and develops well above experimentally accessible temperatures. Further, the CDW wavevector shows a nonmonotonic temperature dependence, exhibiting Yamada behavior at low temperature with a sudden change occurring near the spin ordering temperature. We describe these observations using a Landau-Ginzburg theory for an incommensurate CDW in a metallic system with a finite charge compressibility and spin-CDW coupling. Extrapolating to high temperature, where the CDW amplitude is small and spin order is absent, our analysis predicts a decreasing wavevector with doping, similar to Y and Bi cuprates. Our study suggests that CDW order in all families of cuprates forms by a common mechanism. [ABSTRACT FROM AUTHOR]

We present the MKID Exoplanet Camera (MEC), a z through J band (800–1400 nm) integral field spectrograph located behind The Subaru Coronagraphic Extreme Adaptive Optics (SCExAO) at the Subaru Telescope on Maunakea that utilizes Microwave Kinetic Inductance Detectors (MKIDs) as the enabling technology for high contrast imaging. MEC is the first permanently deployed near-infrared MKID instrument and is designed to operate both as an IFU, and as a focal plane wavefront sensor in a multi-kHz feedback loop with SCExAO. The read noise free, fast time domain information attainable by MKIDs allows for the direct probing of fast speckle fluctuations that currently limit the performance of most high contrast imaging systems on the ground and will help MEC achieve its ultimate goal of reaching contrasts of 10−7 at 2 λ/D. Here we outline the instrument details of MEC including the hardware, firmware, and data reduction and analysis pipeline. We then discuss MEC's current on-sky performance and end with future upgrades and plans. [ABSTRACT FROM AUTHOR]

Microcalorimeters based on transition-edge sensors (TESs) have been successfully deployed in numerous spectroscopic instruments that operate over a large range of incident photon energies. TES microcalorimeter arrays combine unmatched energy resolution with broadband spectral coverage and high quantum efficiency. An important application requiring these characteristics is nondestructive isotopic analysis via gamma-ray spectroscopy of the complex mixtures of actinide isotopes found in the nuclear fuel cycle. Steady progress has been made over the last ten years to develop TES microcalorimeter instruments for this application, leading to arrays that demonstrate significantly better energy resolution than the state-of-the-art high-purity germanium (HPGe) sensors. However, further algorithm development and automation of the data analysis procedure have been required to bring these systems closer to being ready for production use. In this article, we describe recent advances in data analysis techniques for gamma-ray data acquired with microcalorimeter systems. In particular, we discuss new approaches to automated calibration of our spectra, and a new approach for quantifying the uncertainty of peak area estimation for isolated peaks. Our data analysis pipeline has also been automated, requiring minimal manual intervention for full processing of data sets, with performance that is sufficient to allow future deployment of real-time spectrum generation. We show that, using this pipeline, we are able to achieve ~0.25% statistical uncertainty in isotope ratios, which indicates that if systematic errors are controlled, microcalorimeter arrays can achieve better than 1% total uncertainty in these measurements. [ABSTRACT FROM AUTHOR]

The energy resolution of a single photon counting microwave kinetic inductance detector can be degraded by noise coming from the primary low temperature amplifier in the detector's readout system. Until recently, quantum limited amplifiers have been incompatible with these detectors due to the dynamic range, power, and bandwidth constraints. However, we show that a kinetic inductance based traveling-wave parametric amplifier can be used for this application and reaches the quantum limit. The total system noise for this readout scheme was equal to ∼2.1 in units of quanta. For incident photons in the 800–1300 nm range, the amplifier increased the average resolving power of the detector from ∼6.7 to 9.3 at which point the resolution becomes limited by noise on the pulse height of the signal. Noise measurements suggest that a resolving power of up to 25 is possible if the redesigned detectors can remove this additional noise source. [ABSTRACT FROM AUTHOR]