1. Spectroscopic ellipsometry and optical transmission study of LiPON thin films prepared by RF sputtering.
- Author
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Su, Yurong, Zhang, Jia, Shokhovets, Sviatoslav, Polity, Angelika, and Meyer, Bruno K.
- Subjects
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THIN films , *RADIOFREQUENCY sputtering , *ELLIPSOMETRY , *LIGHT transmission , *IONIC conductivity , *TRANSPARENCY (Optics) - Abstract
Lithium phosphorus oxynitride (LiPON) film with high ionic conductivity, low electronic conductivity and high transparency in UV-VIS range offers the possible applications as electrolyte for optical devices, e.g. electrochromic device. In this work, the optical properties of LiPON are investigated by means of variable-angle spectroscopic ellipsometry (VASE) and optical transmission spectra. LiPON thin films with composition of Li3.13PO1.69N1.39 and ionic conductivity of 4.9 × 10−6 S cm−1 at room temperature were prepared by RF magnetron sputtering. Optical constants have been derived on multiple samples with film thickness from 400 to 2000 nm in the energy range of 0.58-5.5 eV. The optical bandgap ( Eg) of LiPON film is shown to be 3.07 eV by a Tauc plot. It is found that when E < Eg the Urbach exponential decay of absorption is observed. The Urbach tail width at room temperature is estimated to be 0.361 eV for the LiPON film. [ABSTRACT FROM AUTHOR]
- Published
- 2017
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