1. Using flexural MEMS to study and exploit nonlinearities: a review.
- Author
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Sidhant Tiwari and Rob N Candler
- Subjects
- *
PARAMETRIC processes , *MICROELECTROMECHANICAL systems - Abstract
This review describes recent experimental developments in the study of nonlinearities for flexural microelectromechanical systems (MEMS) structures. It includes motivation for studying a variety of nonlinear phenomena, highlighting applications where nonlinearities are relevant. Examples are described where nonlinearities are seen as a nuisance, along with techniques used to mitigate the nonlinearities. More recently, efforts to exploit nonlinearities for improved performance have emerged and are also described. After a summary of the theory behind nonlinear mechanisms, the article describes progress in several areas of nonlinearity: engineering nonlinearities to enhance performance, bifurcations and multistability, parametric processes, frequency mixing, nonlinearly coupled resonances, and nonlinear dissipation. [ABSTRACT FROM AUTHOR]
- Published
- 2019
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