1. Evaluation of elasto-plastic properties of ITO film using combined nanoindentation and finite element approach.
- Author
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Gupta, Ankur Kumar, Porwal, Deeksha, Dey, Arjun, Sridhara, N., Mukhopadhyay, Anoop Kumar, Sharma, Anand Kumar, and Barshilia, Harish C.
- Subjects
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ELASTOPLASTICITY , *INDIUM tin oxide , *METALLIC thin films , *NANOINDENTATION , *FINITE element method , *CHEMISTRY experiments - Abstract
Here we report for the first time the combined nanoindentation experiments and finite element modeling to investigate the in-depth nanomechanical behavior of ~1.25 μm indium tin oxide (ITO) film. The ITO film is grown on silicon substrate by a reactive direct current (DC) magnetron sputtering technique. Here, the contributions of both film and substrate are considered in a power law based nonlinear material model. Based on experimental data a detailed study is carried out in the present work to investigate the stress–strain behavior, the related von-Mises stress and equivalent plastic strain of the ITO film. In addition, the effect of the nanoindentation response of the ITO film on the silicon substrate is also evaluated. [ABSTRACT FROM AUTHOR]
- Published
- 2016
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