1. Growth mode control of the free carrier density in SrTiO3-δ films.
- Author
-
Ohtomo, A. and Hwang, H. Y.
- Subjects
- *
STRONTIUM compounds , *TITANIUM compounds , *OXIDES , *ELECTRIC properties of thin films , *METAL-insulator transitions - Abstract
We have studied the growth dynamics and electronic properties of SrTiO3-δ homoepitaxial films by pulsed laser deposition. We find that the two dominant factors determining the growth mode are the kinetics of surface crystallization and of oxidation. When matched, persistent two-dimensional layer-by-layer growth can be obtained for hundreds of unit cells. By tuning these kinetic factors, oxygen vacancies can be frozen in the film, allowing controlled, systematic doping across a metal-insulator transition. Metallic films can be grown, exhibiting Hall mobilities as high as 25 000 cm2/V s. [ABSTRACT FROM AUTHOR]
- Published
- 2007
- Full Text
- View/download PDF