1. Integration of GaN Crystals on Micropatterned Si(00 1) Substrates by Plasma-Assisted Molecular Beam Epitaxy.
- Author
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Fabio Isa, Caroline Chèze, Marcin Siekacz, Christian Hauswald, Jonas Lähnemann, Sergio Fernández-Garrido, Thomas Kreiliger, Manfred Ramsteiner, Yadira Arroyo Rojas Dasilva, Oliver Brandt, Giovanni Isella, Rolf Erni, Raffaella Calarco, Henning Riechert, and Leo Miglio
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GALLIUM nitride , *MOLECULAR beam epitaxy , *STRAINS & stresses (Mechanics) , *PLASMA-enhanced chemical vapor deposition , *SURFACE roughness - Abstract
We present an innovative approachto integrate arrays of isolated,strain-free GaN crystals on patterned Si substrates. First, micrometer-sizedpillars are patterned onto Si(0 0 1) substrates. Subsequently, 2.5μm Si substrates are deposited by low-energy plasma-enhancedchemical vapor deposition, forming crystals mostly bounded by {1 11}, {1 1 3}, and {15 3 23} facets. Plasma-assisted molecular beamepitaxy is then used for GaN deposition. GaN crystals with slanted{0 0 0 1} facets having a root-mean-square surface roughness of 0.7nm are obtained for a deposited material thickness of >3 μm.Microphotoluminescence measurements performed at room and cryogenictemperature show no yellow luminescence and a neutral donor-boundA exciton transition at 3.471 eV (10 K) with a full width at half-maximumof 10 meV. Microphotoluminescence and micro-Raman spectra reveal thatGaN grown on Si pillars is strain-free. Our results indicate thatthe shape of GaN crystals can be tuned by the pattern periodicityand that a reduction of threading dislocations is achieved in theirtop part. [ABSTRACT FROM AUTHOR]
- Published
- 2015
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