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Your search keyword '"Hampden-Smith, M. J."' showing total 2 results
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2 results on '"Hampden-Smith, M. J."'

1. Low-temperature copper etching via reactions with Cl2 and PEt3 under ultrahigh vacuum conditions.

Author

Farkas, J., Chi, K.-M., Hampden-Smith, M. J., Kodas, T. T., and Dubois, L. H.

Subjects
*COPPER absorption & adsorption, *COPPER surfaces, *ULTRAHIGH vacuum
Abstract

Presents information on a study which investigated the adsorption and desorption behavior of PEt[sub3] on copper and chlorinated copper surfaces under ultrahigh vacuum conditions. Experimental procedures; Results and discussion; Conclusion.

Published
1993
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2. Formation of copper patterns on poly(tetrafluoroethylene) via radiation controlled chemical etching and chemical-vapor deposition.

Author

Rye, R. R., Knapp, J. A., Chi, K.-M., Hampden-Smith, M. J., and Kodas, T. T.

Subjects
*COPPER, *RADIATION, *SEMICONDUCTOR etching, *CHEMICAL vapor deposition, *THIN films
Abstract

Presents a study which described the formation of copper patterns on poly(tetrafluoroethylene) (PTFE) via radiation controlled chemical etching and chemical-vapor deposition. Process of the deposition of patterned copper films on poly(tetrafluoroethylene); Metal that has a low resistivity than copper; Factor that makes it difficult for PTFE to metallize; Use of copper films as Celerier and Machet point out.

Published
1992
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