1. X-ray absorption fine structure of diamond films grown by chemical vapor deposition.
- Author
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Capehart, T. W., Perry, T. A., Beetz, C. B., Belton, D. N., Fisher, G. B., Beall, C. E., Yates, B. N., and Taylor, J. W.
- Subjects
- *
DIAMOND thin films , *CHEMICAL vapor deposition - Abstract
We report the x-ray absorption spectra for two hard carbon films grown by filament-assisted chemical vapor deposition in gas mixtures of 1% and 0.18% methane in hydrogen. Although the Raman spectra of these two films suggest significant differences in structure, the x-ray absorption near-edge structure and extended x-ray absorption fine structure (EXAFS) are very similar. Analyzing the EXAFS from these films with a diamond crystal as a reference gives carboncarbon bond lengths of 1.53±0.03 Å. This result is consistent with diamond and incompatible with graphite. We conclude that the carbon films have the same local structure as diamond. [ABSTRACT FROM AUTHOR]
- Published
- 1989
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