1. Micromagnetic technology for detection of carbon impurity in crystalline silicon.
- Author
-
Yu, Runqiao, Hu, Bo, Zou, Hengcai, Xiao, Wenbo, Cheng, Qiangqiang, Xu, Weijin, and Xin, Jijun
- Subjects
- *
MICROMAGNETICS , *SILICON crystals , *IMPURITY distribution in semiconductors , *GEOMAGNETISM , *MAGNETIC permeability , *METALLOGRAPHY - Abstract
Abstract: This paper proposes a method of lossless micromagnetic detection in the geomagnetic field for detecting traces of carbon impurity defects in crystalline silicon. The magnetization tests show that crystalline silicon is a diamagnetic substance with a stronger relative permeability than carbon. Micromagnetic decay theory is gained according to the energy decay. When the geomagnetic field penetrates through the materials, the apparent magnetic susceptibility can be calculated and subsequently used to project the images. The resulting image clearly showed the location of the defects. Test results are proved by the metallographic phase and spectral analysis. New method and ideas are provided for effective detection of trace carbon impurity defects in the crystalline silicon. [Copyright &y& Elsevier]
- Published
- 2014
- Full Text
- View/download PDF