1. Recent Progress in MEMS Fiber-Optic Fabry–Perot Pressure Sensors.
- Author
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Chen, Ye, Lu, Dongqin, Xing, Huan, Ding, Haotian, Luo, Junxian, Liu, Hanwen, Kong, Xiangxu, and Xu, Fei
- Subjects
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PRESSURE sensors , *MEMS resonators , *MICROELECTROMECHANICAL systems , *THREE-dimensional printing - Abstract
Pressure sensing plays an important role in many industrial fields; conventional electronic pressure sensors struggle to survive in the harsh environment. Recently microelectromechanical systems (MEMS) fiber-optic Fabry–Perot (FP) pressure sensors have attracted great interest. Here we review the basic principles of MEMS fiber-optic FP pressure sensors and then discuss the sensors based on different materials and their industrial applications. We also introduce recent progress, such as two-photon polymerization-based 3D printing technology, and the state-of-the-art in this field, e.g., sapphire-based sensors that work up to 1200 °C. Finally, we discuss the limitations and opportunities for future development. [ABSTRACT FROM AUTHOR]
- Published
- 2024
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