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Tr ithis paper, the growth of graphene on sapphire substrate was studied by the experimental preparation and simulation using chemical vapor deposition (CVD) method 􀀀 which focused on the effect of substrate surface morphology and growth temperature. The microstructure of graphene was investigated by atomic force microscope (AFM),X-ray diffraction (XRD) ？ field emission scanning electron microscope (FESEM) ？ Raman spectroscopy (Raman),and high resolution transmission electron microscope (HRTEM) respectively. The simulation results indicated that hydrogen had an important influence on the surface morphology of the substrate. Under the action of H atom ? the Al-() bond was elongated by 51.42% ? which was almost fractured ？ and it affected the surface roughness of the sapphire substrate. Tt was found that H had an etching effect on the surface of sapphire substrate？ and the surface roughness Ra of the etched sapphire substrate became larger, which made it difficult to grow graphene. When the growth temperature increased 􀀀 the quality of the graphene also became better. [ABSTRACT FROM AUTHOR]