1. Low-voltage MEMS optical phase modulators and switches on a indium phosphide membrane on silicon
- Author
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Yuqing Jiao, René van Veldhoven, Francesco Pagliano, Tianran Liu, Vadim Pogoretskiy, Andrea Fiore, Semiconductor Nanophotonics, Photonics and Semiconductor Nanophysics, NanoLab@TU/e, Photonic Integration, Eindhoven Hendrik Casimir institute, and Center for Quantum Materials and Technology Eindhoven
- Subjects
010302 applied physics ,Materials science ,Physics and Astronomy (miscellaneous) ,Extinction ratio ,business.industry ,Amplifier ,Phase (waves) ,Biasing ,02 engineering and technology ,021001 nanoscience & nanotechnology ,01 natural sciences ,Optical switch ,0103 physical sciences ,Optoelectronics ,Crossbar switch ,0210 nano-technology ,business ,Low voltage ,Phase modulation - Abstract
In this paper, an optical switch based on a microelectromechanical phase modulator is presented. Phase tuning is achieved by tuning the vertical gap between two vertically coupled waveguides through the application of a reverse bias on a p-i-n junction. An effective refractive index tuning Δneff of 0.03 and a phase shift of more than 3π rad at telecom wavelengths are measured with an on-chip Mach–Zehnder interferometer (MZI), with a phase-tuning length of only 140 μm. With a bias voltage of 5.1 V, a half-wave-voltage-length product (Vπ L) of 5.6 × 10−3 V·cm is achieved. Furthermore, optical crossbar switching in a MZI is demonstrated with a 15 dB extinction ratio using an actuation voltage of only 4.2 V. Our work provides a solution to on-chip, low-voltage phase modulation and optical switching. The switch is fabricated on an indium-phosphide membrane on a silicon substrate, which enables the integration with active components (e.g., amplifiers, lasers, and detectors) on a single chip.In this paper, an optical switch based on a microelectromechanical phase modulator is presented. Phase tuning is achieved by tuning the vertical gap between two vertically coupled waveguides through the application of a reverse bias on a p-i-n junction. An effective refractive index tuning Δneff of 0.03 and a phase shift of more than 3π rad at telecom wavelengths are measured with an on-chip Mach–Zehnder interferometer (MZI), with a phase-tuning length of only 140 μm. With a bias voltage of 5.1 V, a half-wave-voltage-length product (Vπ L) of 5.6 × 10−3 V·cm is achieved. Furthermore, optical crossbar switching in a MZI is demonstrated with a 15 dB extinction ratio using an actuation voltage of only 4.2 V. Our work provides a solution to on-chip, low-voltage phase modulation and optical switching. The switch is fabricated on an indium-phosphide membrane on a silicon substrate, which enables the integration with active components (e.g., amplifiers, lasers, and detectors) on a single chip.
- Published
- 2019