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The article announces the IEEE International Symposium on Technology and Society, scheduled from September 18-20 in Puebla, Mexico, focusing on the Social Implications of Artificial Intelligence (AI), inviting submissions from academia, industry, and government to explore AI's impacts.

Transistor random threshold voltage variations due to process fluctuations seriously affects the stability of Static Random Access Memory (SRAM). In this paper, a SRAM bit transistors threshold voltage $({Vth})$ deviation monitoring scheme and system is proposed. This scheme ingeniously achieves on-chip measurement of all transistors threshold voltages without altering compact SRAM bit array layout. Control signal strategies and Transistor ${Vth}$ Determination Circuit (TVDC) for different types of Devices Under Test (DUTs) have been proposed. The system is implemented using a 65 nm CMOS process with a core area of 0.01875mm2. Through Monte Carlo analysis, the Weighted Average (WA) difference of the proposed scheme and the direct measurement method is not more than 10mV, and the Root Mean Square Error (RMSE) difference is not more than 3mV. This system can also effectively detect the cell position of the transistor threshold voltage mismatch simulated by modifying the substrate voltage. For SRAM arrays of different scales, the method proposed in this paper has area efficiency and flexible reconfigurability. [ABSTRACT FROM AUTHOR]

This paper studies simultaneous scheduling of production and material transfer that arises in the semiconductor photolithography area. In particular, the right reticle and right job both need to be present to process the job. Jobs are transferred by a material handling system that employees a fleet of vehicles. Reticles serving as an auxiliary resource are also transferred from one place to another by a different set of vehicles. This intricate scheduling challenge, encompassing jobs, reticles, machines, and two distinct sets of vehicles, is explored here for the first time. The paper introduces a multi-stage methodology that involves relaxation, a constructive heuristic, constraint programming, and a warm-start approach to address this complex problem. [ABSTRACT FROM AUTHOR]

The document is the table of contents for the May 2024 issue of the IEEE Transactions on Semiconductor Manufacturing. It includes papers on various topics such as yield modeling, analysis, and enhancement, advanced processing, advanced process control, equipment and automation technology, non-silicon materials, emerging areas, and environment, safety, and health. The articles cover subjects such as chip-scale chemical mechanical polishing, threshold voltage deviation monitoring, curvilinear standard cell design, fabrication of silicon nanocone arrays, improving the reliability of through silicon vias, energy consumption and carbon emission reduction in HVAC systems, low-k silicon dioxide synthesis, chemical mechanical polishing of diamond epitaxial layers, conditional variable selection based on deep learning, and eco-friendly dry-cleaning and diagnostics of silicon dioxide deposition chambers. The document also includes an announcement for the call for nominations for the 2024 IEEE EDS Early Career Award. [Extracted from the article]

Chemical mechanical polishing/planarization (CMP) combines physical grinding and chemical reactions to planarize the wafer surface. The complex mechanism of CMP brings great challenges to the mechanism-based modeling process. The data-driven CMP modeling process is limited by insufficient datasets. At the same time, these two types of models generally have high computational complexity. In this paper, we introduce the group method of data handling (GMDH)-type polynomial network to build the CMP model to address the above challenges. We designed and manufactured the test chip using a 28nm process. The measurement data from the test chip shows that compared with the mechanism-based CMP model, the trained CMP model based on GMDH-type polynomial network has higher accuracy and lower computational complexity, with the average simulation speed being 115x faster. Experiments based on silicon data show that this modeling method has a small demand for data, and 20 randomly selected sets of data can meet the needs for modeling the current CMP process. [ABSTRACT FROM AUTHOR]

This paper proposes a linear regression model for scalar-valued responses and two-way functional (bivariate) predictors. Our motivation stems from the quality evaluation of products based on optical emission spectroscopy data from virtual metrology of semiconductor manufacturing. We focus on multivariate cases where the smoothness and shapes of the data vary significantly across variables. We propose a two-step solution to this problem, consisting of decomposition and prediction. First, we decompose the two-way functional data into pairs of component functions using functional singular value decomposition. Next, we build functional linear models for the decomposed functional variables and obtain the final predictor by averaging the models. Results from numerical studies, including simulation studies and real data analysis, demonstrate the promising empirical properties of the proposed approach, especially when the number of predictors is large. [ABSTRACT FROM AUTHOR]

It has been a widely growing interest in using silicon carbide (SiC) in high-power electronic devices. Yet, SiC wafers may contain killer defects that could reduce fabrication yield and make the device fall into unexpected failures. To prevent these failures from happening, it is very important to develop inspection tools that can detect, characterize and locate these defects in a non-invasive way. Current inspection techniques such as Dark Field or Bright field microscopy are effectively able to visualize most such defects; however, there are some scenarios where the inspection becomes problematic or almost impossible, such as when the defects are too small or have low contrast or if the defects lie deep into the substrate. Thus, an alternative method is needed to face these challenges. In this paper, we demonstrate the application of coherent Fourier scatterometry (CFS) as a complementary tool in addition to the conventional techniques to overcome different and problematic scenarios of killer defects inspection on SiC samples. Scanning electron microscopy (SEM) has been used to assess the same defects to validate the findings of CFS. Great consistency has been demonstrated in the comparison between the results obtained with CFS and SEM. [ABSTRACT FROM AUTHOR]

This paper addresses the quality control of the photolithography process in the semiconductor industry. Overlay errors in the process seriously affect the wafer yield, and cause the wafer to be forced to rework and affect the production efficiency of the equipment. We examine the current state of its process control, develop a novel overlay predict model, and verify the prediction results. This study proposes a Global Attention Generative Adversarial Networks (GAGAN) model to precisely predict the overlay error for the feed-forward data of the front layer, which is used as the important information and process parameters for the advanced process control of the current layer. Experiment results on a semiconductor shop-floor confirms that our proposed method achieves high predictive performance while maintaining extensibility and visual quality. [ABSTRACT FROM AUTHOR]

A scheduling problem for parallel batch processing machines (BPMs) with jobs having unequal ready times in semiconductor wafer fabrication facilities (wafer fabs) is studied in this paper. A blended objective function combining the total weighted tardiness (TWT) and the total electricity cost (TEC) under a time-of-use (TOU) tariff is considered. A genetic programming (GP) procedure is designed to automatically discover priority indices for a heuristic scheduling framework. Results of computational experiments are reported that demonstrate that the learned priority indices lead to high-quality schedules in a short amount of computing time. [ABSTRACT FROM AUTHOR]

Unmanned Aerial Vehicles (UAVs) rely on satellite systems for stable positioning. However, due to limited satellite coverage or communication disruptions, UAVs may lose signals for positioning. In such situations, vision-based techniques can serve as an alternative, ensuring the self-positioning capability of UAVs. However, most of the existing datasets are developed for the geo-localization task of the objects captured by UAVs, rather than UAV self-positioning. Furthermore, the existing UAV datasets apply discrete sampling to synthetic data, such as Google Maps, neglecting the crucial aspects of dense sampling and the uncertainties commonly experienced in practical scenarios. To address these issues, this paper presents a new dataset, DenseUAV, that is the first publicly available dataset tailored for the UAV self-positioning task. DenseUAV adopts dense sampling on UAV images obtained in low-altitude urban areas. In total, over 27K UAV- and satellite-view images of 14 university campuses are collected and annotated. In terms of methodology, we first verify the superiority of Transformers over CNNs for the proposed task. Then we incorporate metric learning into representation learning to enhance the model’s discriminative capacity and to reduce the modality discrepancy. Besides, to facilitate joint learning from both the satellite and UAV views, we introduce a mutually supervised learning approach. Last, we enhance the Recall@K metric and introduce a new measurement, SDM@K, to evaluate both the retrieval and localization performance for the proposed task. As a result, the proposed baseline method achieves a remarkable Recall@1 score of 83.01% and an SDM@1 score of 86.50% on DenseUAV. The dataset and code have been made publicly available on https://github.com/Dmmm1997/DenseUAV. [ABSTRACT FROM AUTHOR]

Efficient point cloud compression is essential for applications like virtual and mixed reality, autonomous driving, and cultural heritage. This paper proposes a deep learning-based inter-frame encoding scheme for dynamic point cloud geometry compression. We propose a lossy geometry compression scheme that predicts the latent representation of the current frame using the previous frame by employing a novel feature space inter-prediction network. The proposed network utilizes sparse convolutions with hierarchical multiscale 3D feature learning to encode the current frame using the previous frame. The proposed method introduces a novel predictor network for motion compensation in the feature domain to map the latent representation of the previous frame to the coordinates of the current frame to predict the current frame’s feature embedding. The framework transmits the residual of the predicted features and the actual features by compressing them using a learned probabilistic factorized entropy model. At the receiver, the decoder hierarchically reconstructs the current frame by progressively rescaling the feature embedding. The proposed framework is compared to the state-of-the-art Video-based Point Cloud Compression (V-PCC) and Geometry-based Point Cloud Compression (G-PCC) schemes standardized by the Moving Picture Experts Group (MPEG). The proposed method achieves more than 88% BD-Rate (Bjøntegaard Delta Rate) reduction against G-PCCv20 Octree, more than 56% BD-Rate savings against G-PCCv20 Trisoup, more than 62% BD-Rate reduction against V-PCC intra-frame encoding mode, and more than 52% BD-Rate savings against V-PCC P-frame-based inter-frame encoding mode using HEVC. These significant performance gains are cross-checked and verified in the MPEG working group. [ABSTRACT FROM AUTHOR]

How to model the effect of reflection is crucial for single image reflection removal (SIRR) task. Modern SIRR methods usually simplify the reflection formulation with the assumption of linear combination of a transmission layer and a reflection layer. However, the large variations in image content and the real-world picture-taking conditions often result in far more complex reflection. In this paper, we introduce a new screen-blur combination based on two important factors, namely the intensity and the blurriness of reflection, to better characterize the reflection formulation in SIRR. Specifically, we present Screen-blur Reflection Networks (SRNet), which executes the screen-blur formulation in its network design and adapts to the complex reflection on real scenes. Technically, SRNet consists of three components: a blended image generator, a reflection estimator and a reflection removal module. The image generator exploits the screen-blur combination to synthesize the training blended images. The reflection estimator learns the reflection layer and a blur degree that measures the level of blurriness for reflection. The reflection removal module further uses the blended image, blur degree and reflection layer to filter out the transmission layer in a cascaded manner. Superior results on three different SIRR methods are reported when generating the training data on the principle of the screen-blur combination. Moreover, extensive experiments on six datasets quantitatively and qualitatively demonstrate the efficacy of SRNet over the state-of-the-art methods. [ABSTRACT FROM AUTHOR]

Recent developments in the field of non-local attention (NLA) have led to a renewed interest in self-similarity-based single image super-resolution (SISR). Researchers usually use the NLA to explore non-local self-similarity (NSS) in SISR and achieve satisfactory reconstruction results. However, a surprising phenomenon that the reconstruction performance of the standard NLA is similar to that of the NLA with randomly selected regions prompted us to revisit NLA. In this paper, we first analyzed the attention map of the standard NLA from different perspectives and discovered that the resulting probability distribution always has full support for every local feature, which implies a statistical waste of assigning values to irrelevant non-local features, especially for SISR which needs to model long-range dependence with a large number of redundant non-local features. Based on these findings, we introduced a concise yet effective soft thresholding operation to obtain high-similarity-pass attention (HSPA), which is beneficial for generating a more compact and interpretable distribution. Furthermore, we derived some key properties of the soft thresholding operation that enable training our HSPA in an end-to-end manner. The HSPA can be integrated into existing deep SISR models as an efficient general building block. In addition, to demonstrate the effectiveness of the HSPA, we constructed a deep high-similarity-pass attention network (HSPAN) by integrating a few HSPAs in a simple backbone. Extensive experimental results demonstrate that HSPAN outperforms state-of-the-art approaches on both quantitative and qualitative evaluations. Our code and a pre-trained model were uploaded to GitHub (https://github.com/laoyangui/HSPAN) for validation. [ABSTRACT FROM AUTHOR]

This paper focuses on the facial micro-expression (FME) generation task, which has potential application in enlarging digital FME datasets, thereby alleviating the lack of training data with labels in existing micro-expression datasets. Despite obvious progress in the image animation task, FME generation remains challenging because existing image animation methods can hardly encode subtle and short-term facial motion information. To this end, we present a facial-prior-guided FME generation framework that takes advantage of facial priors for facial motion generation. Specifically, we first estimate the geometric locations of action units (AUs) with detected facial landmarks. We further calculate an adaptive weighted prior (AWP) map, which alleviates the estimation error of AUs while efficiently capturing subtle facial motion patterns. To achieve smooth and realistic synthesis results, we use our proposed facial prior module to guide motion representation and generation modules in mainstream image animation frameworks. Extensive experiments on three benchmark datasets consistently show that our proposed facial prior module can be adopted in image animation frameworks and significantly improve their performance on micro-expression generation. Moreover, we use the generation technique to enlarge existing datasets, thereby improving the performance of general action recognition backbones on the FME recognition task. Our code is available at https://github.com/sysu19351158/FPB-FOMM. [ABSTRACT FROM AUTHOR]

Small moving objects at far distance always occupy only one or a few pixels in image and exhibit extremely limited visual features, which bring great challenges to motion detection. Highly evolved visual systems endow flying insects with remarkable ability to pursue tiny mates and prey, providing a good template to develop image processing method for small target motion detection. The insects’ excellent sensitivity to small moving objects is believed to come from a class of specific neurons called small target motion detectors (STMDs). However, existing STMD-based methods often experience performance degradation when coping with complex natural scenes. In this paper, we propose a bio-inspired visual system with spatio-temporal feedback mechanism (called Spatio-Temporal Feedback STMD) to suppress false positive background movement while enhancing system responses to small targets. Specifically, the proposed visual system is composed of two complementary subnetworks and a feedback loop. The first subnetwork is designed to extract spatial and temporal movement patterns of cluttered background by neuronal ensemble coding. The second subnetwork is developed to capture small target motion information where its output and signal from the first subnetwork are integrated together via the feedback loop to filter out background false positives in a recurrent manner. Experimental results demonstrate that the proposed spatio-temporal feedback visual system is more competitive than existing methods in discriminating small moving targets from complex natural environments. [ABSTRACT FROM AUTHOR]

Effectively evaluating the perceptual quality of dehazed images remains an under-explored research issue. In this paper, we propose a no-reference complex-valued convolutional neural network (CV-CNN) model to conduct automatic dehazed image quality evaluation. Specifically, a novel CV-CNN is employed that exploits the advantages of complex-valued representations, achieving better generalization capability on perceptual feature learning than real-valued ones. To learn more discriminative features to analyze the perceptual quality of dehazed images, we design a dual-stream CV-CNN architecture. The dual-stream model comprises a distortion-sensitive stream that operates on the dehazed RGB image, and a haze-aware stream on a novel dark channel difference image. The distortion-sensitive stream accounts for perceptual distortion artifacts, while the haze-aware stream addresses the possible presence of residual haze. Experimental results on three publicly available dehazed image quality assessment (DQA) databases demonstrate the effectiveness and generalization of our proposed CV-CNN DQA model as compared to state-of-the-art no-reference image quality assessment algorithms. [ABSTRACT FROM AUTHOR]

Most researchers focus on designing accurate crowd counting models with heavy parameters and computations but ignore the resource burden during the model deployment. A real-world scenario demands an efficient counting model with low-latency and high-performance. Knowledge distillation provides an elegant way to transfer knowledge from a complicated teacher model to a compact student model while maintaining accuracy. However, the student model receives the wrong guidance with the supervision of the teacher model due to the inaccurate information understood by the teacher in some cases. In this paper, we propose a dual-knowledge distillation (DKD) framework, which aims to reduce the side effects of the teacher model and transfer hierarchical knowledge to obtain a more efficient counting model. First, the student model is initialized with global information transferred by the teacher model via adaptive perspectives. Then, the self-knowledge distillation forces the student model to learn the knowledge by itself, based on intermediate feature maps and target map. Specifically, the optimal transport distance is utilized to measure the difference of feature maps between the teacher and the student to perform the distribution alignment of the counting area. Extensive experiments are conducted on four challenging datasets, demonstrating the superiority of DKD. When there are only approximately 6% of the parameters and computations from the original models, the student model achieves a faster and more accurate counting performance as the teacher model even surpasses it. [ABSTRACT FROM AUTHOR]

The "IEEE Transactions on Semiconductor Manufacturing" is a journal that publishes the latest advancements in the manufacturing of microelectronic and photonic components. It aims to enhance knowledge and improve manufacturing practices in the semiconductor industry. The journal covers various topics such as process integration, manufacturing equipment performance, yield analysis, metrology, and supply chain management. Papers submitted to the journal should focus on practical engineering techniques for solving manufacturing-related problems. The journal follows a peer-review process and encourages authors from low-income countries to submit their work. The standard length for regular papers is eight pages, and shorter contributions can be submitted as letters. The journal provides guidelines for manuscript preparation, including the use of the IEEE template style. It also accepts graphical abstracts and electronic supplements. Authors are responsible for preparing a publication-quality manuscript and may use English language editing services if needed. Plagiarism is strictly prohibited, and manuscripts found to have plagiarized content may be penalized. Authors are required to have an Open Researcher and Contributor ID (ORCID) and can submit their manuscripts online. The journal offers both traditional and open access publication options, with associated fees. Native language author names are supported, and page charges may apply for publication. The IEEE holds the copyright to the published material. [Extracted from the article]

As we enter a New Year, we can look back on another year of solid accomplishment at IEEE Transactions on Semiconductor Manufacturing. I am happy to report that our impact factor remains steady at 2.70, and our mean time to first decision remains competitive at 8.3 weeks. Our Editorial Board remains as strong as ever, with the addition of Dr. Jun-Haeng Lee in the area of machine learning and data science applications in 2023, and we are actively seeking new board members. Our submissions remain strong, as do the special sections from conferences (ASMC, ISSM and CS-MANTECH). The Special Issue on Production-Level Artificial Intelligence Applications in Semiconductor Manufacturing appeared in the November issue, and two additional special issues are in preparation. Prof. Duane Boning of MIT and Dr. Bill Nehrer of Technology Consultancy are co-editing a special issue on “Semiconductor Design for Manufacturing,” which will be a collaborative effort with the IEEE Transactions on Electron Devices. Drs. Oliver Patterson of Intel and Tomasz Brozek of PDF Solutions are also co-editing a special issue on sustainable semiconductor manufacturing. We are also happy to announce the Best paper Award for 2023, in the companion editorial appearing in this issue. Congratulations to all the honorees, and we hope we will continue to see their submissions in the future. Our thanks go to Drs. Jeanne Bickford, Dragan Djurdjanovic and Mahadeva Iyer Natarajan for their work on this committee. [ABSTRACT FROM AUTHOR]